石英电容差动重力敏感器

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石英电容差动重力敏感器

本发明采用石英挠性摆片结构，石英挠性摆片同上下两个石英电极板的位置检测电极构成差分检测电容，重力的变化引起石英挠性摆片的运动，从而导致差分检测电容的变化，通过专门电路将差分检测电容的变化转换成电压，加到上下两个石英电极板的激力电极上，用静电力的方式给石英挠性摆片施矩，使石英挠性摆片平衡，并通过施矩量测量敏感重力的变化。

与目前石英电容差动重力敏感器采用磁力施矩的方法不同，由于省去了传统石英挠性加速度计采用的磁缸和力矩线圈，因而克服了磁缸磁场强度、线圈参数的长期稳定性和杂散分布电容、环境温度变化等因素的影响，因而有利于敏感器的长期稳定性和重复性。

Quartzcapacitor differential gravity sensor

Aquartz flexible swinging piece structure is adopted, a differential detectingcapacitor is formed by a quartz flexible swinging piece and position detectingelectrodes of upper and lower quartz electrode plates, the quartz flexibleswinging piece moves due to gravity changing, and therefore the differentialdetecting capacitor is changed; changing of the differential detectingcapacitor is converted into voltage through a special circuit, the voltage isapplied to exciting electrodes of the upper and lower quartz electrode plates,moments are exerted on the quartz flexible swinging piece in an electrostaticforce mode to enable the quartz flexible swinging piece to be balanced, andchanging of sensitive gravity is measured through the moment exerting quantity.Different from a method for exerting moments by magnetic force of an existingquartz capacitor differential gravity sensor, since magnetic cylinders andmoment coils adopted by a traditional quartz flexible accelerometer areomitted, the influence of factors including the magnetic field intensity of themagnetic cylinders, long-term stability of coil parameters, stray capacitors,environment temperature change and the like is overcome, and long-termstability and repeatability of the sensor are facilitated.